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Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

  • Shin, Eun Jung
  • Yeo, Hong Goo
  • Yeon, Ara
  • Jin, Changzhu
  • Park, Wonki
  • Lee, Sung-Chul
  • Choi, Hongsoo
  • 2020-06
  • Shin, Eun Jung. (2020-06). Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film. Micromachines, 11(6), 1–17. doi: 10.3390/mi11060623
  • Multidisciplinary Digital Publishing Institute (MDPI)
  • View : 633
  • Download : 107

The Design and Optimization of a Compressive-Type Vector Sensor Utilizing a PMN-28PT Piezoelectric Single-Crystal

  • Yeo, Hong Goo
  • Choi, Junhee
  • Jin, Changzhu
  • Pyo, Seonghun
  • Roh, Yongrae
  • Choi, Hongsoo
  • 2019-12
  • Yeo, Hong Goo. (2019-12). The Design and Optimization of a Compressive-Type Vector Sensor Utilizing a PMN-28PT Piezoelectric Single-Crystal. doi: 10.3390/s19235155
  • MDPI AG
  • View : 518
  • Download : 151
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