Cited 5 time in webofscience Cited 6 time in scopus

Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

Title
Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film
Authors
Shin, Eun JungYeo, Hong GooYeon, AraJin, ChangzhuPark, WonkiLee, Sung-ChulChoi, Hongsoo
DGIST Authors
Shin, Eun Jung; Yeo, Hong Goo; Yeon, Ara; Jin, Changzhu; Park, Wonki; Lee, Sung-Chul; Choi, Hongsoo
Issue Date
2020-06
Citation
Micromachines, 11(6), 1-17
Type
Article
Article Type
Article
Author Keywords
aluminum nitridepiezoelectric micromachined ultrasonic transducer (pMUT)two-dimensional (2D) array
Keywords
PMUT ARRAYFINGERPRINT SENSORHIGH-FREQUENCYFABRICATIONIMPROVEMENT
ISSN
2072-666X
Abstract
This study presents the fabrication and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT; radius: 40 μm) using a patterned aluminum nitride (AlN) thin film as the active piezoelectric material. A 20 x 20 array of pMUTs using a 1 μm thick AlN thin film was designed and fabricated on a 2 x 2 mm2 footprint for a high fill factor. Based on the electrical impedance and phase of the pMUT array, the electromechanical coefficient was ~1.7% at the average resonant frequency of 2.82 MHz in air. Dynamic displacement of the pMUT surface was characterized by scanning laser Doppler vibrometry. The pressure output while immersed in water was 19.79 kPa when calculated based on the peak displacement at the resonant frequency. The proposed AlN pMUT array has potential applications in biomedical sensing for healthcare, medical imaging, and biometrics. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
URI
http://hdl.handle.net/20.500.11750/12656
DOI
10.3390/mi11060623
Publisher
Multidisciplinary Digital Publishing Institute (MDPI)
Related Researcher
  • Author Choi, Hongsoo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
Collection:
Department of Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles


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