Cited time in webofscience Cited time in scopus

Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

Title
Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film
Author(s)
Shin, Eun JungYeo, Hong GooYeon, AraJin, ChangzhuPark, WonkiLee, Sung-ChulChoi, Hongsoo
Issued Date
2020-06
Citation
Micromachines, v.11, no.6, pp.1 - 17
Type
Article
Author Keywords
aluminum nitridepiezoelectric micromachined ultrasonic transducer (pMUT)two-dimensional (2D) array
Keywords
PMUT ARRAYFINGERPRINT SENSORHIGH-FREQUENCYFABRICATIONIMPROVEMENT
ISSN
2072-666X
Abstract
This study presents the fabrication and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT; radius: 40 μm) using a patterned aluminum nitride (AlN) thin film as the active piezoelectric material. A 20 x 20 array of pMUTs using a 1 μm thick AlN thin film was designed and fabricated on a 2 x 2 mm2 footprint for a high fill factor. Based on the electrical impedance and phase of the pMUT array, the electromechanical coefficient was ~1.7% at the average resonant frequency of 2.82 MHz in air. Dynamic displacement of the pMUT surface was characterized by scanning laser Doppler vibrometry. The pressure output while immersed in water was 19.79 kPa when calculated based on the peak displacement at the resonant frequency. The proposed AlN pMUT array has potential applications in biomedical sensing for healthcare, medical imaging, and biometrics. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
URI
http://hdl.handle.net/20.500.11750/12656
DOI
10.3390/mi11060623
Publisher
Multidisciplinary Digital Publishing Institute (MDPI)
Related Researcher
  • 최홍수 Choi, Hongsoo
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files in This Item:
000551639400001.pdf

000551639400001.pdf

기타 데이터 / 3.85 MB / Adobe PDF download
Appears in Collections:
Department of Robotics and Mechatronics Engineering Bio-Micro Robotics Lab 1. Journal Articles

qrcode

  • twitter
  • facebook
  • mendeley

Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE