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Article
Effect of a-SiN : H thin film deposited by PE/RACVD on a-Si : H thin film transistor
  • Kang, Jae Wook ; 
  • Park, Kyung Won ; 
  • Park, Byung Nam ; 
  • Moon, Kyo Ho ; 
  • Choi, Sie Young ; 
  • Shon, Young-Soo
  • 2006-12
  • Kang, Jae Wook. (2006-12). Effect of a-SiN : H thin film deposited by PE/RACVD on a-Si : H thin film transistor. Molecular Crystals and Liquid Crystals, 459(1), 157–165. doi: 10.1080/15421400600930136
  • Taylor & Francis
  • View : 244
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Article
Effect of a-SiN : H thin film deposited by PE/RACVD on a-Si : H thin film transistor
  • Kang, Jae Wook ; 
  • Park, Kyung Won ; 
  • Park, Byung Nam ; 
  • Moon, Kyo Ho ; 
  • Choi, Sie Young ; 
  • Shon, Young-Soo
  • 2006-12
  • Kang, Jae Wook. (2006-12). Effect of a-SiN : H thin film deposited by PE/RACVD on a-Si : H thin film transistor. Molecular Crystals and Liquid Crystals, 459(1), 157–165. doi: 10.1080/15421400600930136
  • Taylor & Francis
  • View : 859
  • Download : 0
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