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Issue Date	Title Author(s) Journal	View
2014-10-15	Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition Park, Ji-Yoon ; Yeo, Seungmin ; Cheon, Taehoon ; Kim, Soo-Hyun ; Kim, Min-Kyu ; Kim, Hyungjun ; Hong, Tae Eun ; Lee, Do-Joong Journal of Alloys and Compounds, v.610, pp.529 - 539, 2014-10-15	610
2009	Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O-2 Eom, Tae-Kwang ; Sari, Windu ; Choi, Kyu-Jeong ; Shin, Woong-Chul ; Kim, Jae Hyun ; Lee, Do-Joong ; Kim, Ki-Bum ; Sohn, Hyunchul ; Kim, Soo-Hyun Electrochemical and Solid State Letters, v.12, no.11, pp.D85 - D88, 2009	600
2009	Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O-2 Eom, Tae-Kwang ; Sari, Windu ; Choi, Kyu-Jeong ; Shin, Woong-Chul ; Kim, Jae Hyun ; Lee, Do-Joong ; Kim, Ki-Bum ; Sohn, Hyunchul ; Kim, Soo-Hyun Electrochemical and Solid State Letters, v.12, no.11, pp.D85 - D88, 2009	55

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