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Article
Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches
  • Nguyen, Chi Thang ; 
  • Gu, Bonwook ; 
  • Cheon, Taehoon ; 
  • Park, Jeongwoo ; 
  • Khan, Mohammad Rizwan ; 
  • Kim, Soo-Hyun ; 
  • Shong, Bonggeun ; 
  • Lee, Han-Bo-Ram
  • 2021-06
  • Nguyen, Chi Thang. (2021-06). Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches. Chemistry of Materials, 33(12), 4435–4444. doi: 10.1021/acs.chemmater.1c00508
  • American Chemical Society
  • View : 380
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Article
Cobalt titanium nitride amorphous metal alloys by atomic layer deposition
  • Nam, Taewook ; 
  • Lee, Chang Wan ; 
  • Cheon, Taehoon ; 
  • Lee, Woo Jae ; 
  • Kim, Soo-Hyun ; 
  • Kwon, Se-Hun ; 
  • Lee, Han-Bo-Ram ; 
  • Kim, Hyungjun
  • 2018-03
  • Nam, Taewook. (2018-03). Cobalt titanium nitride amorphous metal alloys by atomic layer deposition. Journal of Alloys and Compounds, 737, 684–692. doi: 10.1016/j.jallcom.2017.12.023
  • Elsevier BV
  • View : 557
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Article
Functionalization of Si3N4 with an aldehyde inhibitor for area selective deposition of HfO2 and SiO2
  • Lee, Byungchan ; 
  • Shim, Seungwon ; 
  • Trinh, Ngoc Le ; 
  • Patil, Aravind H. ; 
  • Nguyen, Chi Thang ; 
  • Cheon, Taehoon ; 
  • Kim, Soo-Hyun ; 
  • Kang, Youngho ; 
  • Lee, Han-Bo-Ram
  • 2025-09
  • Journal of Materials Chemistry C, v.13, no.37, pp.19316 - 19329
  • Royal Society of Chemistry
  • View : 49
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