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Title
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Thesis
The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)
Lee, Kyungtak
2018
Lee, Kyungtak. (2018). The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs). doi: 10.22677/thesis.200000007153
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