The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)
- Title
- The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)
- Alternative Title
- 질화 알루미늄 (AlN) 기반의 압전 미세 가공 초음파 트랜스 듀서(pMUT)를 이용한 생체인식 용 소형 센서의 시뮬레이션 및 제작
- Author(s)
- Lee, Kyungtak
- Advisor
- Choi, Hong Soo
- Co-Advisor(s)
- Lee, Jung Hyup
- Issued Date
- 2018
- Awarded Date
- 2018. 2
- Type
- Thesis
- Access Rights
- The original item will not be provided upon request from the author
- URI
-
http://dgist.dcollection.net/common/orgView/200000007153
http://hdl.handle.net/20.500.11750/6050
- Degree
- Master
- Department
- Robotics Engineering
- Publisher
- DGIST
- Files in This Item:
-
There are no files associated with this item.
- Appears in Collections:
- Department of Robotics and Mechatronics Engineering Theses Master
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