Title

The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)

Alternative Title

질화 알루미늄 (AlN) 기반의 압전 미세 가공 초음파 트랜스 듀서(pMUT)를 이용한 생체인식 용 소형 센서의 시뮬레이션 및 제작

Advisor

Choi, Hong Soo

Co-Advisor(s)

Lee, Jung Hyup

Issued Date

2018

Awarded Date

2018. 2

Citation

Lee, Kyungtak. (2018). The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs). doi: 10.22677/thesis.200000007153

Type

Thesis

Access Rights

The original item will not be provided upon request from the author

URI

http://dgist.dcollection.net/common/orgView/200000007153
http://hdl.handle.net/20.500.11750/6050

DOI

10.22677/thesis.200000007153

Degree

Master

Department

Robotics Engineering

Publisher

DGIST

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