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The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)

Title
The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)
Translated Title
질화 알루미늄 (AlN) 기반의 압전 미세 가공 초음파 트랜스 듀서(pMUT)를 이용한 생체인식 용 소형 센서의 시뮬레이션 및 제작
Authors
Lee, Kyungtak
Advisor(s)
Choi, Hong Soo
Co-Advisor(s)
Lee, Jung Hyup
Issue Date
2018
Available Date
2018-03-14
Degree Date
2018. 2
Type
Thesis
Access Rights
The original item will not be provided upon request from the author
URI
http://dgist.dcollection.net/common/orgView/200000007153
http://hdl.handle.net/20.500.11750/6050
DOI
10.22677/thesis.200000007153
Degree
Master
Department
Robotics Engineering
University
DGIST
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
There are no files associated with this item.
Collection:
Department of Robotics EngineeringThesesMaster


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