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The impact of electrode materials on 1/f noise in piezoelectric AlN contour mode resonators

  • Kim, Hoe Joon
  • Jung, Soon In
  • Segovia-Fernandez, J.
  • Piazza, G.
  • 2018-05
  • Kim, Hoe Joon. (2018-05). The impact of electrode materials on 1/f noise in piezoelectric AlN contour mode resonators. doi: 10.1063/1.5024961
  • American Institute of Physics Inc.
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