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Article
Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches
  • Nguyen, Chi Thang ; 
  • Gu, Bonwook ; 
  • Cheon, Taehoon ; 
  • Park, Jeongwoo ; 
  • Khan, Mohammad Rizwan ; 
  • Kim, Soo-Hyun ; 
  • Shong, Bonggeun ; 
  • Lee, Han-Bo-Ram
  • 2021-06
  • Nguyen, Chi Thang. (2021-06). Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches. Chemistry of Materials, 33(12), 4435–4444. doi: 10.1021/acs.chemmater.1c00508
  • American Chemical Society
  • View : 461
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Article
Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects
  • Nguyen, Chi Thang ; 
  • Kim, Miso ; 
  • Kim, Youn-Hye ; 
  • Cheon, Taehoon ; 
  • Trinh, Ngoc Le ; 
  • Kim, Sehee ; 
  • Kim, Soo-Hyun ; 
  • Shong, Bonggeun ; 
  • Lee, Han-Bo-Ram
  • 2025-12
  • Chemistry of Materials, v.37, no.24, pp.9745 - 9757
  • American Chemical Society
  • View : 129
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Article
Low-Temperature Atomic Layer Deposition of Highly Conformal Tin Nitride Thin Films for Energy Storage Devices
  • Ansari, Mohd Zahid ; 
  • Nandi, Dip K. ; 
  • Janicek, Petr ; 
  • Ansari, Sajid Ali ; 
  • Ramesh, Rahul ; 
  • Cheon, Taehoon ; 
  • Shong, Bonggeun ; 
  • Kim, Soo-Hyun
  • 2019-11
  • Ansari, Mohd Zahid. (2019-11). Low-Temperature Atomic Layer Deposition of Highly Conformal Tin Nitride Thin Films for Energy Storage Devices. ACS Applied Materials & Interfaces, 11(46), 43608–43621. doi: 10.1021/acsami.9b15790
  • American Chemical Society
  • View : 939
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