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Article
Growth of Highly Conformal TiCx Films Using Atomic Layer Deposition Technique
  • Hong, Tae Eun ; 
  • Choi, Sang-Kyung ; 
  • Kim, Soo-Hyun ; 
  • Cheon, Taehoon
  • 2013-04
  • Hong, Tae Eun. (2013-04). Growth of Highly Conformal TiCx Films Using Atomic Layer Deposition Technique. Journal of the American Ceramic Society, 96(4), 1060–1062. doi: 10.1111/jace.12289
  • Wiley Blackwell
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