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Article
Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO 2 /SiO 2 /Si films
  • Min, Won Ja ; 
  • Marmitt, Gabriel ; 
  • Grande, Pedro L. ; 
  • Moon, DaeWon
  • 2019-07
  • Min, Won Ja. (2019-07). Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO 2 /SiO 2 /Si films. doi: 10.1002/sia.6642
  • John Wiley & Sons Inc.
  • View : 547
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