Cited 2 time in webofscience Cited 2 time in scopus

Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO 2 /SiO 2 /Si films

Title
Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO 2 /SiO 2 /Si films
Authors
Min, Won JaMarmitt, GabrielGrande, Pedro L.Moon, DaeWon
Issue Date
2019-07
Citation
Surface and Interface Analysis, 51(7), 712-721
Type
Article
Article Type
Article
Author Keywords
electronic stopping powerHfO2 ultrahin filmMEISRRT
Keywords
Depth profilingHafnium oxidesIonsPlasma interactionsSuperconducting tapesElectronic stoppingElectronic stopping powerElectrostatic analyzerInterface structuresMedium energy ion scatteringMEISQuantitative depth profilingStopping and range of ions in mattersUltrathin films
ISSN
0142-2421
Abstract
Medium-energy ion scattering (MEIS) has been used for quantitative depth profiling with single atomic layer resolution to determine the composition, thickness, and interface structure of ultrathin films and nanoparticles. To assure the consistency of the MEIS analysis, an international round-robin test (RRT) with nominally 1-, 3-, 5-, and 7-nm thick HfO 2 films was conducted among 12 institutions. The measurements were performed at each participating laboratory under their own conditions, and the collected data were analyzed. For the data analysis, the Moliere potential, the stopping and range of ions in matter (SRIM) 95 and new fitted electronic stopping power and the Chu straggling were used. For analyzing the MEIS data from the magnetic sector and electrostatic analyzers, the neutralization corrections of Marion and Young for 100-keV H + and He + ions and of Armstrong for 400- to 500-keV He + ions were used. The standard deviations were 5.3% for the composition, 15.3% for the thickness, and 13.3% for the Hf content, and they were improved to 7.3%, 4.5%, and 7.0% by using refitted electronic stopping powers based on the experimental data. Hence, this study suggests that correct electronic stopping powers are critical for quantitative MEIS analysis. © 2019 John Wiley & Sons, Ltd.
URI
http://hdl.handle.net/20.500.11750/9996
DOI
10.1002/sia.6642
Publisher
John Wiley & Sons Inc.
Files:
There are no files associated with this item.
Collection:


qrcode mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE