DGIST Scholar: Browsing Repository

DGIST Scholar

Jump to: All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z; 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 3 of 3

Issue Date	Title Author(s) Journal	View
2012-10	A bilayer diffusion barrier of Ru/WSixNy for advanced Cu interconnects Eom, Tae-Kwang ; Sari, Windu ; Cheon, Taehoon ; Kim, Soo-Hyun ; Kim, Woo Kyoung Elsevier BV, 2012-10	651
2018-03	Cobalt titanium nitride amorphous metal alloys by atomic layer deposition Nam, Taewook ; Lee, Chang Wan ; Cheon, Taehoon ; Lee, Woo Jae ; Kim, Soo-Hyun ; Kwon, Se-Hun ; Lee, Han-Bo-Ram ; Kim, Hyungjun Journal of Alloys and Compounds, v.737, pp.684 - 692, 2018-03	269
2014-07-01	The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect Mun, Ki-Yeung ; Hong, Tae Eun ; Cheon, Taehoon ; Jang, Yujin ; Lim, Byoung-Yong ; Kim, Sunjung ; Kim, Soo-Hyun Thin Solid Films, v.562, pp.118 - 125, 2014-07-01	497

DGIST

DGIST Scholar was built with support from the OAK distribution project by the National Library of Korea.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Library Services Team, DGIST 333. Techno Jungang-daero, Hyeonpung-myeon, Dalseong-gun, Daegu, 42988, Republic of Korea.

RSS_1.0 RSS_2.0 ATOM_1.0