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Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

Article
Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film
  • Shin, Eun Jung ; 
  • Yeo, Hong Goo ; 
  • Yeon, Ara ; 
  • Jin, Changzhu ; 
  • Park, Wonki ; 
  • Lee, Sung-Chul ; 
  • Choi, Hongsoo
  • 2020-06
  • Shin, Eun Jung. (2020-06). Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film. Micromachines, 11(6), 1–17. doi: 10.3390/mi11060623
  • Multidisciplinary Digital Publishing Institute (MDPI)
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