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A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators

Article
A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators
  • 2019-11
  • Jung, Soon In. (2019-11). A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators. Micromachines, 10(11). doi: 10.3390/mi10110758
  • Multidisciplinary Digital Publishing Institute (MDPI)
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