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A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators

Title
A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators
Authors
Jung, Soon InRyu C.Piazza G.Kim, Hoe Joon
DGIST Authors
Kim, Hoe Joon
Issue Date
2019-11
Citation
Micromachines, 10(11)
Type
Article
Article Type
Article
Author Keywords
MEMSaluminum nitrideresonatordampingquality factorelectromechanical coupling
Keywords
MEMS RESONATORHIGH-FREQUENCYOSCILLATORNOISE
ISSN
2072-666X
Abstract
This study presents the effects of bottom electrode designs on the operation of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs were analyzed with varying bottom electrode areas at two resonant frequencies (f0) of about 230 MHz and 1.1 GHz. Specifically, we analyzed the impact of bottom electrode coverage rates on the resonator quality factor (Q) and electromechanical coupling (k2), which are important parameters for Radio Frequency (RF) and sensing applications. From our experiments, Q exhibited different trends to electrode coverage rates depending on the device resonant frequencies, while k2 increased with the coverage rate regardless of f0. Along with experimental measurements, our finite element analysis (FEA) revealed that the bottom electrode coverage rate determines the active (or vibrating) region of the resonator and, thus, directly impacts Q. Additionally, to alleviate thermoelastic damping (TED) and focus on mechanical damping effects, we analyzed the device performance at 10 K. Our findings indicated that a careful design of bottom electrodes could further improve both Q and k2 of AlN CMRs, which ultimately determines the power budget and noise level of the resonator in integrated oscillators and sensor systems. © 2019 by the authors.
URI
http://hdl.handle.net/20.500.11750/11025
DOI
10.3390/mi10110758
Publisher
Multidisciplinary Digital Publishing Institute (MDPI)
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
Collection:
Department of Robotics EngineeringNano Materials and Devices Lab1. Journal Articles


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