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Article
A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators
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- Piazza G. ;
- Kim, Hoe Joon
- 2019-11
- Jung, Soon In. (2019-11). A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators. Micromachines, 10(11). doi: 10.3390/mi10110758
- Multidisciplinary Digital Publishing Institute (MDPI)
- View : 711
- Download : 153
- Zhu, Yao ;
- Zheng, Yuanjin ;
- Gao, Yuan ;
- Made, Darmayuda I. ;
- Sun, Chengliang ;
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- Gu, Alex Yuandong
- 2015-04
- Zhu, Yao. (2015-04). An Energy Autonomous 400 MHz Active Wireless SAW Temperature Sensor Powered by Vibration Energy Harvesting. IEEE Transactions on Circuits and Systems I: Regular Papers, 62(4), 976–985. doi: 10.1109/TCSI.2015.2402937
- Institute of Electrical and Electronics Engineers Inc.
- View : 1014
- Download : 0
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