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A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators

  • 2019-11
  • Jung, Soon In. (2019-11). A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators. Micromachines, 10(11). doi: 10.3390/mi10110758
  • Multidisciplinary Digital Publishing Institute (MDPI)
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  • Zhu, Yao
  • Zheng, Yuanjin
  • Gao, Yuan
  • Made, Darmayuda I.
  • Sun, Chengliang
  • Je, Minkyu
  • Gu, Alex Yuandong
  • 2015-04
  • Zhu, Yao. (2015-04). An Energy Autonomous 400 MHz Active Wireless SAW Temperature Sensor Powered by Vibration Energy Harvesting. IEEE Transactions on Circuits and Systems I: Regular Papers, 62(4), 976–985. doi: 10.1109/TCSI.2015.2402937
  • Institute of Electrical and Electronics Engineers Inc.
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