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Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

Article
Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array
  • Yeo, Hong Goo ; 
  • Jung, Joontaek ; 
  • Sim, Minkyung ; 
  • Jang, Jae Eun ; 
  • Choi, Hongsoo
  • 2020-01
  • Yeo, Hong Goo. (2020-01). Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array. doi: 10.3390/s20010315
  • MDPI AG
  • View : 757
  • Download : 125
Article
MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate
  • Jang, Jongmoon ; 
  • Jang, Jeong Hun ; 
  • Choi, Hongsoo
  • 2017-07
  • Jang, Jongmoon. (2017-07). MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate. Journal of Micromechanics and Microengineering, 27(7). doi: 10.1088/1361-6439/aa7236
  • Institute of Physics Publishing
  • View : 1116
  • Download : 0
Article
SU-8-based nanoporous substrate for migration of neuronal cells
  • Kim, Eunhee ; 
  • Yoo, Seung-Jun ; 
  • Moon, Cheil ; 
  • Nelson, Bradley J. ; 
  • Choi, Hongsoo
  • 2015-06
  • Kim, Eunhee. (2015-06). SU-8-based nanoporous substrate for migration of neuronal cells. Microelectronic Engineering, 141, 173–177. doi: 10.1016/j.mee.2015.03.016
  • Elsevier B.V.
  • View : 1218
  • Download : 0
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