Cited 5 time in webofscience Cited 6 time in scopus

Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

Title
Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array
Authors
Yeo, Hong GooJung, JoontaekSim, MinkyungJang, Jae EunChoi, Hongsoo
DGIST Authors
Jang, Jae EunChoi, Hongsoo
Issue Date
2020-01
Citation
Sensors, 30(1), 315
Type
Article
Article Type
Article
Author Keywords
piezoelectric tactile sensoraluminum nitridethin filmflexible support layer
Keywords
POLYMER TACTILE SENSORELECTRONIC SKININ-VIVOPVDFPZTPOLYDIMETHYLSILOXANEFABRICATIONSU-8
ISSN
1424-8220
Abstract
This research focuses on the development of a flexible tactile sensor array consisting of aluminum nitride (AlN) based on micro-electro-mechanical system (MEMS) technology. A total of 2304 tactile sensors were integrated into a small area of 2.5 × 2.5 cm2. Five hundred nm thick AlN film with strong c-axis texture was sputtered on Cr/Au/Cr (50/50/5 nm) layers as the sacrificial layer coated on a Si wafer. To achieve device flexibility, polydimethylsiloxane (PDMS) polymer and SU-8 photoresist layer were used as the supporting layers after etching away a release layer. Twenty-five mM (3-mercaptopropyl) trimethoxysilane (MPTMS) improves the adhesion between metal and polymers due to formation of a self-assembled monolayer (SAM) on the surface of the top electrode. The flexible tactile sensor has 8 × 8 channels and each channel has 36 sensor elements with nine SU-8 bump blocks. The tactile sensor array was demonstrated to be flexible by bending 90 degrees. The tactile sensor array was demonstrated to show clear spatial resolution through detecting the distinct electrical response of each channel under local mechanical stimulus. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
URI
http://hdl.handle.net/20.500.11750/11396
DOI
10.3390/s20010315
Publisher
MDPI AG
Related Researcher
  • Author Jang, Jae Eun Advanced Electronic Devices Research Group(AEDRG) - Jang Lab.
  • Research Interests Nanoelectroinc device; 생체 신호 센싱 시스템 및 생체 모방 디바이스; 나노 통신 디바이스
Files:
Collection:
Department of Information and Communication EngineeringAdvanced Electronic Devices Research Group(AEDRG) - Jang Lab.1. Journal Articles
Department of Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles


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