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Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

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Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array
  • Yeo, Hong Goo ; 
  • Jung, Joontaek ; 
  • Sim, Minkyung ; 
  • Jang, Jae Eun ; 
  • Choi, Hongsoo
  • 2020-01
  • Yeo, Hong Goo. (2020-01). Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array. doi: 10.3390/s20010315
  • MDPI AG
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