DGIST Library Repository

Browsing by Titles

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 1 of 1

Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

Article
Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film
  • Shin, Eun Jung ; 
  • Yeo, Hong Goo ; 
  • Yeon, Ara ; 
  • Jin, Changzhu ; 
  • Park, Wonki ; 
  • Lee, Sung-Chul ; 
  • Choi, Hongsoo
  • 2020-06
  • Shin, Eun Jung. (2020-06). Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film. Micromachines, 11(6), 1–17. doi: 10.3390/mi11060623
  • Multidisciplinary Digital Publishing Institute (MDPI)
  • View : 633
  • Download : 107
1