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Issue Date Title Author(s) Journal View
2019-09
Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process

Baik, Seunghun ;  Kwon, Hyeokjin ;  Paeng, Chuck ;  Zhang, He ;  Kalkofen, Bodo ;  Jang, Jae Eun ;  Kim, Y. S. ;  Kwon, Hyuk-Jun

IEEE Electron Device Letters, v.40, no.9, pp.1507 - 1510, 2019-09

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