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Issue Date	Title Author(s) Journal	View
2020-06	Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film Shin, Eun Jung ; Yeo, Hong Goo ; Yeon, Ara ; Jin, Changzhu ; Park, Wonki ; Lee, Sung-Chul ; Choi, Hongsoo Micromachines, v.11, no.6, pp.1 - 17, 2020-06	408

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