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실험용 미세동물의 EMG 측정용 미세전극 및 그 제작 방법, 및 미세전극을 이용한 실험용 미세동물의 EMG 측정 시스템
- 실험용 미세동물의 EMG 측정용 미세전극 및 그 제작 방법, 및 미세전극을 이용한 실험용 미세동물의 EMG 측정 시스템
- 최석용; 변동학; 조성준; 남태승; 김명규; 김소희
- DGIST Inventors
- Application Date
- Application No.
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- Registration No.
- The present disclosure relates to a microelectrode for measuring EMG signals of a laboratory microfauna. The present disclosure includes a metal plate with an insulating plate deposited on a surface, a plurality of silicon substrates disposed on the insulating plate, the silicon substrates being electrically connected to the metal plate, covered with an insulator, and adjacent to one another, and a plurality of needle electrodes, each formed on the respective silicon substrates as an integral part thereof, wherein the needle electrodes have the same predetermined length, have a tapered shape from the respective silicon substrates, are spaced apart from each other by a predetermined distance, and wherein a metallic layer is formed on each of the needle electrodes by depositing metal materials, the insulator is formed on the metallic layer, and a portion of the metallic layer at a tip is exposed.
- Related Researcher
Neural Interfaces & MicroSystems Lab
Neural interface; Brain interface; Bio MEMS; Soft MEMS; Stretchable electronics; Zebrafish electrophysiology
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- Department of Robotics EngineeringNeural Interfaces & MicroSystems Lab3. Patents
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