Title

Fabrication and analysis of micro-mesh patterned PHR sensor

Alternative Title

마이크로 패턴 PHR 센서의 제작 및 특성 분석

DGIST Authors

Jeon, Changyeop ; Lee, Jung Rok ; Kim, CheolGi

Advisor

김철기

Co-Advisor(s)

Jung Rok Lee

Issued Date

2020

Awarded Date

2020-02

Citation

Changyeop Jeon. (2020). Fabrication and analysis of micro-mesh patterned PHR sensor. doi: 10.22677/Theses.200000285738

Type

Thesis

Description

Magnetoresistive sensor,Planar hall effect,Anisotropic magnetoresistance

Table Of Contents

Abstract i
List of contents ii
List of figures iv

Ⅰ. Introduction 1
Ⅱ. Theoretical background 2
2.1 MR (Magnetoresistance) Sensor 2
2.1.1 AMR, PHR Sensor 2
Ⅲ. Experiment 4
3.1 Fabrication of Pattern 4
3.1.1 Lift-off Process 4
3.1.2 Photolithography 4
3.1.2 Sputtering 7
3.2.2.1 Diode sputtering 8
3.2.2.2 Magnetron sputtering 10
3.3 Characterization techniques 11
3.3.1 MR (Magnetoresistance) Measurement 11
3.3.2 VSM (Vibrating sample magnetometer) 13
Ⅳ. Result & Discussion 14
4.1 Meshed PHR sensor 14
4.1.1 Sensor characteristics 15
4.2 Bridge geometry effect in Meshed sensor. 17
4.2.1 Sensor characteristics 18
4.3 Tilted junction of Meshed sensor 21
4.3.1 Tilted junction in voltage line 22
4.3.2 Tilted junction in current and voltage line 24
Ⅴ. Conclusion 28
References 29
Summary 33

URI

http://dgist.dcollection.net/common/orgView/200000285738
http://hdl.handle.net/20.500.11750/11989

DOI

10.22677/Theses.200000285738

Degree

Master

Department

Emerging Materials Science

Publisher

DGIST

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