Fabrication and analysis of micro-mesh patterned PHR sensor
- Title
- Fabrication and analysis of micro-mesh patterned PHR sensor
- Alternative Title
- 마이크로 패턴 PHR 센서의 제작 및 특성 분석
- Author(s)
- Changyeop Jeon
- DGIST Authors
- Jeon, Changyeop ; Lee, Jung Rok ; Kim, CheolGi
- Advisor
- 김철기
- Co-Advisor(s)
- Jung Rok Lee
- Issued Date
- 2020
- Awarded Date
- 2020-02
- Type
- Thesis
- Description
- Magnetoresistive sensor,Planar hall effect,Anisotropic magnetoresistance
- Table Of Contents
-
Abstract i
List of contents ii
List of figures iv
Ⅰ. Introduction 1
Ⅱ. Theoretical background 2
2.1 MR (Magnetoresistance) Sensor 2
2.1.1 AMR, PHR Sensor 2
Ⅲ. Experiment 4
3.1 Fabrication of Pattern 4
3.1.1 Lift-off Process 4
3.1.2 Photolithography 4
3.1.2 Sputtering 7
3.2.2.1 Diode sputtering 8
3.2.2.2 Magnetron sputtering 10
3.3 Characterization techniques 11
3.3.1 MR (Magnetoresistance) Measurement 11
3.3.2 VSM (Vibrating sample magnetometer) 13
Ⅳ. Result & Discussion 14
4.1 Meshed PHR sensor 14
4.1.1 Sensor characteristics 15
4.2 Bridge geometry effect in Meshed sensor. 17
4.2.1 Sensor characteristics 18
4.3 Tilted junction of Meshed sensor 21
4.3.1 Tilted junction in voltage line 22
4.3.2 Tilted junction in current and voltage line 24
Ⅴ. Conclusion 28
References 29
Summary 33
- URI
-
http://dgist.dcollection.net/common/orgView/200000285738
http://hdl.handle.net/20.500.11750/11989
- Degree
- Master
- Department
- Emerging Materials Science
- Publisher
- DGIST
- Files in This Item:
-
There are no files associated with this item.
- Appears in Collections:
- Department of Physics and Chemistry Theses Master
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