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Fabrication and analysis of micro-mesh patterned PHR sensor

Title
Fabrication and analysis of micro-mesh patterned PHR sensor
Translated Title
마이크로 패턴 PHR 센서의 제작 및 특성 분석
Authors
Changyeop Jeon
DGIST Authors
Jeon, Changyeop; Lee, Jung Rok; Kim, CheolGi
Advisor(s)
김철기
Co-Advisor(s)
Jung Rok Lee
Issue Date
2020
Available Date
2020-06-23
Degree Date
2020-02
Type
Thesis
Description
Magnetoresistive sensor,Planar hall effect,Anisotropic magnetoresistance
Table Of Contents
Abstract i List of contents ii List of figures iv Ⅰ. Introduction 1 Ⅱ. Theoretical background 2 2.1 MR (Magnetoresistance) Sensor 2 2.1.1 AMR, PHR Sensor 2 Ⅲ. Experiment 4 3.1 Fabrication of Pattern 4 3.1.1 Lift-off Process 4 3.1.2 Photolithography 4 3.1.2 Sputtering 7 3.2.2.1 Diode sputtering 8 3.2.2.2 Magnetron sputtering 10 3.3 Characterization techniques 11 3.3.1 MR (Magnetoresistance) Measurement 11 3.3.2 VSM (Vibrating sample magnetometer) 13 Ⅳ. Result & Discussion 14 4.1 Meshed PHR sensor 14 4.1.1 Sensor characteristics 15 4.2 Bridge geometry effect in Meshed sensor. 17 4.2.1 Sensor characteristics 18 4.3 Tilted junction of Meshed sensor 21 4.3.1 Tilted junction in voltage line 22 4.3.2 Tilted junction in current and voltage line 24 Ⅴ. Conclusion 28 References 29 Summary 33
URI
http://dgist.dcollection.net/common/orgView/200000285738
http://hdl.handle.net/20.500.11750/11989
DOI
10.22677/Theses.200000285738
Degree
Master
Department
Emerging Materials Science
University
DGIST
Related Researcher
  • Author Kim, CheolGi Lab for NanoBio-MatErials & SpinTronics(nBEST)
  • Research Interests Magnetic Materials and Spintronics; Converging Technology of Nanomaterials and Biomaterials; Bio-NEMS;MEMS
Files:
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Collection:
Department of Emerging Materials ScienceThesesMaster


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