Development of Planar Hall resistance sensor for bio analytics
- Title
- Development of Planar Hall resistance sensor for bio analytics
- Author(s)
- Sung Joon Kim
- DGIST Authors
- Kim, CheolGi ; Kim, Sung Joon ; Lee, Sung Bae
- Advisor
- 김철기
- Co-Advisor(s)
- Sung Bae Lee
- Issued Date
- 2020
- Awarded Date
- 2020-02
- Type
- Thesis
- Description
- In Vitro Diagnosis, PHR sensor, Alzheimer's disease, β-amyloid
- Table Of Contents
-
Ⅰ. Introduction 1
Ⅱ. Theory 7
2.1. Theory of the Planar Hall effect 7
2.1.1. Theory of the cross type Planar Hall resistance sensor 7
2.1.2. Magnetic energy 10
2.1.2.1. Zeeman energy 11
2.1.2.2. Uniaxial energy 11
2.1.2.3. Exchange anisotropy energy 11
2.1.2.4. Shape anisotropy energy 12
2.1.2.5. Total energy 12
2.2. Theory of the PHR sensor signal from magnetic labels 14
2.2.1. Single magnetic label signal 14
2.2.2. Self-field detection 18
2.3. Antibody-antigen reaction 21
Ⅲ. Experimental techniques 27
3.1. DC/RF magnetron sputtering 27
3.2. Photolithography 30
3.3. Measurement system 37
3.3.1. Magnetization measurement 37
3.3.2. Magnetization measurement 38
Ⅳ. Result 39
4.1. Equisensitive adjustment of planar Hall effect sensor’s operating field range by material and thickness variation of active layers 39
4.1.1. Introduction 39
4.1.2. Experimental procedures 41
4.1.3. Result and discussion 44
4.1.3.1. Effect of Mo addition NiFe on field range and sensitivity of PHE sensor, based on NiFe/IrMn bilayers 44
4.1.3.2. Reduction of power consumption by thickness variation of non-magnetic spacer and capping layers, maintaining the PHE sensitivity at the same value 52
4.1.4. Conclusion 56
4.2. Performance validation of planar Hall resistance biosensor through beta-amyloid biomarker 57
4.2.1. Optimization of PHR sensor structure 57
4.2.1.1. Bilayer 57
4.2.1.2. Trilayer 58
4.2.1.3. Optimization of trilayer 60
4.2.2. Detection through beta-amyloid biomarker 63
4.2.2.1. Surface chemistry of sandwich binding process 63
4.2.3. Compare the signal quality between the 1f mode and 2f mode 65
4.2.4. Real-time detection by 2f mode through the beta-amyloid 70
4.2.5. Conclusion 73
요약문 78
- URI
-
http://dgist.dcollection.net/common/orgView/200000283136
http://hdl.handle.net/20.500.11750/11990
- Degree
- Doctor
- Department
- Emerging Materials Science
- Publisher
- DGIST
- Related Researcher
-
-
Kim, CheolGi
- Research Interests Magnetic Materials and Spintronics; Converging Technology of Nanomaterials and Biomaterials; Bio-NEMS;MEMS
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- Files in This Item:
-
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- Appears in Collections:
- Department of Physics and Chemistry Theses Ph.D.
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