Title

Design, fabrication, and application of self-aligned cilia microstructures for energy harvesting and pressure sensing

Alternative Title

자기 정렬 섬모구조를 활용한 에너지 하베스터 및 유연 압력 센서

DGIST Authors

Jungyeun Seo ; Hoejoon Kim ; Sukho Park

Advisor

김회준

Co-Advisor(s)

Sukho Park

Issued Date

2022

Awarded Date

2022/02

Citation

Jungyeun Seo. (2022). Design, fabrication, and application of self-aligned cilia microstructures for energy harvesting and pressure sensing. doi: 10.22677/thesis.200000594277

Type

Thesis

Subject

Microstructure, Cilia, Triboelectric nanogenerator, Energy harvesting, Pressure sensor, 미세구조, 섬모, 마찰전기 나노발전기, 에너지 하베스팅, 압력 센서

Description

Microstructure, Cilia, Triboelectric nanogenerator, Energy harvesting, Pressure sensor, 미세구조, 섬모, 마찰전기 나노발전기, 에너지 하베스팅, 압력 센서

Table Of Contents

I. Introduction and Motivation 1
II. Background 4
2.1 Triboelectric nanogenerator (TENG) 4
2.1.1 Working principle of the triboelectric nanogenerator (TENG) 4
2.1.2 Triboelectric series 6
2.1.3 Fundamental theory 7
2.2 Working principle of the pressure sensor 10
2.3 Comparison of the microstructure formation method 12
III. Materials and methods for the C-TENG 15
3.1 Fabrication of the cilia structured TENG (C-TENG) 15
3.2 Characterization 16
IV. Results and discussions for the C-TENG 17
4.1 Cilia structured layer characterization 17
4.2 Performance of the C-TENG 20
4.3 Application of the C-TENG 22
V. Materials and methods for the FMCP 24
5.1 Fabrication of the cilia structured active layer 24
5.1.1 Mesoscale cilia structured layer 25
5.1.2 Carbon black (CB) permeation 27
5.2 Fabrication of the interdigitated electrode (IDE) layer 27
5.3 Characterization 29
VI. Results and discussions for the FMCP 29
6.1 Cilia structured active layer characterization 29
6.2 Performance of the FMCP 32
6.3 Application of the FMCP 35
VII. Conclusion 36
VIII. Reference 38
Appendix 47
1. Carbon black 47
2. Universal Testing Machine (UTM) 47
3. Photograph of the device loading state 48
3.1 Cilia structured TENG (C-TENG) 48
3.2 Flexible mesoscale cilia based pressure sensor (FMCP) 48
요약문 49

URI

http://dgist.dcollection.net/common/orgView/200000594277
http://hdl.handle.net/20.500.11750/16268

DOI

10.22677/thesis.200000594277

Degree

Master

Department

Robotics Engineering

Publisher

DGIST

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