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Design, fabrication, and application of self-aligned cilia microstructures for energy harvesting and pressure sensing

Title
Design, fabrication, and application of self-aligned cilia microstructures for energy harvesting and pressure sensing
Alternative Title
자기 정렬 섬모구조를 활용한 에너지 하베스터 및 유연 압력 센서
Author(s)
Jungyeun Seo
DGIST Authors
Jungyeun SeoHoejoon KimSukho Park
Advisor
김회준
Co-Advisor(s)
Sukho Park
Issued Date
2022
Awarded Date
2022/02
Type
Thesis
Subject
Microstructure, Cilia, Triboelectric nanogenerator, Energy harvesting, Pressure sensor, 미세구조, 섬모, 마찰전기 나노발전기, 에너지 하베스팅, 압력 센서
Description
Microstructure, Cilia, Triboelectric nanogenerator, Energy harvesting, Pressure sensor, 미세구조, 섬모, 마찰전기 나노발전기, 에너지 하베스팅, 압력 센서
Table Of Contents
I. Introduction and Motivation 1
II. Background 4
2.1 Triboelectric nanogenerator (TENG) 4
2.1.1 Working principle of the triboelectric nanogenerator (TENG) 4
2.1.2 Triboelectric series 6
2.1.3 Fundamental theory 7
2.2 Working principle of the pressure sensor 10
2.3 Comparison of the microstructure formation method 12
III. Materials and methods for the C-TENG 15
3.1 Fabrication of the cilia structured TENG (C-TENG) 15
3.2 Characterization 16
IV. Results and discussions for the C-TENG 17
4.1 Cilia structured layer characterization 17
4.2 Performance of the C-TENG 20
4.3 Application of the C-TENG 22
V. Materials and methods for the FMCP 24
5.1 Fabrication of the cilia structured active layer 24
5.1.1 Mesoscale cilia structured layer 25
5.1.2 Carbon black (CB) permeation 27
5.2 Fabrication of the interdigitated electrode (IDE) layer 27
5.3 Characterization 29
VI. Results and discussions for the FMCP 29
6.1 Cilia structured active layer characterization 29
6.2 Performance of the FMCP 32
6.3 Application of the FMCP 35
VII. Conclusion 36
VIII. Reference 38
Appendix 47
1. Carbon black 47
2. Universal Testing Machine (UTM) 47
3. Photograph of the device loading state 48
3.1 Cilia structured TENG (C-TENG) 48
3.2 Flexible mesoscale cilia based pressure sensor (FMCP) 48
요약문 49
URI
http://dgist.dcollection.net/common/orgView/200000594277

http://hdl.handle.net/20.500.11750/16268
DOI
10.22677/thesis.200000594277
Degree
Master
Department
Robotics Engineering
Publisher
DGIST
Related Researcher
  • 김회준 Kim, Hoe Joon
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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Department of Robotics and Mechatronics Engineering Theses Master

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