Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 장재은 | - |
| dc.contributor.author | Jiwon Chae | - |
| dc.date.accessioned | 2022-03-07T16:00:18Z | - |
| dc.date.available | 2022-03-07T16:00:18Z | - |
| dc.date.issued | 2022 | - |
| dc.identifier.uri | http://dgist.dcollection.net/common/orgView/200000596361 | en_US |
| dc.identifier.uri | http://hdl.handle.net/20.500.11750/16283 | - |
| dc.description | Active matrix, Neural probe, Transistor array, IGZO TFT | - |
| dc.description.statementofresponsibility | N | - |
| dc.description.tableofcontents | Ⅰ. Introduction 1 1.1 Motivation 1 1.2 Neural interface system 2 1.2.1 Biocompatibility 4 1.2.2 Mechanical mismatch 6 1.2.3 Electrical properties 7 1.3 Materials for neural probe 8 1.4 Electrode array 9 1.4.1 Dot array 10 1.4.2 Active matrix 10 1.4.2.1 Active matrix of 1T design 10 1.4.2.2 Active matrix of 2T design 12 1.5 IGZO TFT 13 Ⅱ. Experimental Details 15 2.1 Device structure 15 2.1.1 Electrode array 16 2.1.2 IGZO TFT 18 2.1.3 Sacrificial layer 19 2.2 Device fabrication 20 2.2.1 TFT fabrication 20 2.2.2 Sacrificial layer 25 2.2.3 Stiffness test 26 Ⅲ. Characteristics of Polyimide Probe 28 3.1 Sacrificial layer 28 3.1.1 Wet etch 28 3.1.1.1 Study of metal sacrificial layer 28 3.1.1.2 Study of silicon sacrificial layer 30 3.1.2 Adhesion layer 32 3.2 Stiffness test 33 Ⅳ. Electrical Characteristics of IGZO TFT 35 4.1 Annealing condition 35 4.2 Substrate of IGZO TFT 37 4.3 Polyimide passivation layer 39 4.4 Source and drain material 41 Ⅴ. Electrical Signal Recording Test 44 5.1 Cell electrical isolation 44 5.2 Electrical signal recording of 1T design 45 5.3 Electrical signal recording of 2T design 46 Ⅵ. Conclusion 49 |
- |
| dc.format.extent | 54 | - |
| dc.language | eng | - |
| dc.publisher | DGIST | - |
| dc.subject | Active matrix, Neural probe, Transistor array, IGZO TFT | - |
| dc.title | Flexible Multi-electrode Neural Probe using Active Matrix Design of Transistor Array | - |
| dc.title.alternative | 액티브 매트릭스 구조의 트랜지스터 어레이를 이용한 유연한 다중전극 신경 탐침 | - |
| dc.type | Thesis | - |
| dc.identifier.doi | 10.22677/thesis.200000596361 | - |
| dc.description.degree | Master | - |
| dc.contributor.department | Information and Communication Engineering | - |
| dc.contributor.coadvisor | Hongki Kang | - |
| dc.date.awarded | 2022/02 | - |
| dc.publisher.location | Daegu | - |
| dc.description.database | dCollection | - |
| dc.citation | XT.IM 채78 202202 | - |
| dc.date.accepted | 1/21/22 | - |
| dc.contributor.alternativeDepartment | 정보통신융합전공 | - |
| dc.embargo.liftdate | 20220831 | - |
| dc.contributor.affiliatedAuthor | Jiwon Chae | - |
| dc.contributor.affiliatedAuthor | Jae Eun Jang | - |
| dc.contributor.affiliatedAuthor | Hongki Kang | - |
| dc.contributor.alternativeName | 채지원 | - |
| dc.contributor.alternativeName | Jae Eun Jang | - |
| dc.contributor.alternativeName | 강홍기 | - |
- Files in This Item:
-
There are no files associated with this item.
- Appears in Collections:
- Department of Electrical Engineering and Computer Science Theses Master
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.