Materials Analysis and Device Integration of Carbon Nanotubes and Rare-Earth Orthoferrites for Hazardous Gas Sensing Applications
- Title
- Materials Analysis and Device Integration of Carbon Nanotubes and Rare-Earth Orthoferrites for Hazardous Gas Sensing Applications
- Author(s)
- Kyungtaek Lee
- DGIST Authors
- Kyungtaek Lee ; Hoe Joon Kim ; Sangyoon Han
- Advisor
- 김회준
- Co-Advisor(s)
- Sangyoon Han
- Issued Date
- 2022
- Awarded Date
- 2022/02
- Type
- Thesis
- Description
- Hazardous Gas Sensing, Perovskite Gas Sensor, Metal Oxide Gas Sensor, Carbon Nanotubes (CNTs) Gas Sensor, Device Integration
- Table Of Contents
-
Ⅰ. Introduction 1
Ⅱ. Perovskite-type LaFeO3 Gas Sensor 5
2.1 Introduction 5
2.2 Processing of the LaFeO3 Ceramics 8
2.3 Results and Discussion 11
2.4 Conclusion 25
Ⅲ. Perovskite-type GdFeO3, GdFeO3 Doped with Co Gas Sensor 26
3.1 Introduction 26
3.2 Processing of the GdFeO3 and Co-Doped GdFeO3 29
3.3 Results and Discussion 31
3.4 Conclusion 46
Ⅳ. Sintering Temperature Effect of SnO2 Gas Sensor 47
4.1 Introduction 47
4.2 Processing of the SnO2 Ceramics 49
4.3 Results and Discussion 50
4.4 Conclusion 61
Ⅴ. Structure Performance Effect of ZnO 63
5.1 Introduction 63
5.2 Processing of the ZnO Ceramics 65
5.3 Results and Discussion 66
5.4 Processing of the ZnO on IDE 69
5.5 Results and Discussion 70
5.6 Conclusion 72
Ⅵ. Carbon Nanotubes Gas Sensor Integrated Pt Microheater 73
6.1 Introduction 73
6.2 Processing of the CNTs on Microheater 77
6.3 Results and Discussion 78
6.4 Conclusion 87
Ⅶ. Conclusion 89
7.1 Material Outlook and Future Prospects 89
7.2 Summary 94
7.3 Future Gas Sensor 95
References 97
요약문 109
Appendix A: CNT Gas Sensor Fabrication Process 111
Appendix B: Perovskite Synthesis of Pellet Type 115
Appendix C: Gas Probe Station Operation 116
- URI
-
http://dgist.dcollection.net/common/orgView/200000593648
http://hdl.handle.net/20.500.11750/16302
- Degree
- Doctor
- Department
- Robotics Engineering
- Publisher
- DGIST
- Related Researcher
-
-
Kim, Hoe Joon 로봇및기계전자공학과
- Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
-
- Files in This Item:
-
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- Appears in Collections:
- Department of Robotics and Mechatronics Engineering Theses Ph.D.
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