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Scalable Recirculating Programmable Silicon Photonic MEMS

Title
Scalable Recirculating Programmable Silicon Photonic MEMS
Authors
Do Y. Kim
DGIST Authors
Do Y. Kim; Sangyoon HanJaesok Yu
Advisor(s)
한상윤
Co-Advisor(s)
Jaesok Yu
Issue Date
2022
Available Date
2022-03-08
Degree Date
2022/02
Type
Thesis
Keywords
Silicon Photonics, Silicon Photonic MEMS, Photonic Integrated Circuits, Programmable Photonics, Programmable Photonic Array
Description
Silicon Photonics, Silicon Photonic MEMS, Photonic Integrated Circuits, Programmable Photonics, Programmable Photonic Array
Table Of Contents
Ⅰ. Introduction 1 1.1 Motivation 1 Ⅱ. Device Architecture 4 2.1 Device Concept 4 2.2 MEMS Devices 6 2.2.1 Cantilever Type MEMS Directional Coupler 7 2.2.2 Vertical Comb Type MEMS Directional Coupler 12 2.2.3 Inplane Comb drive Type Phase Shifter 14 Ⅲ. Results 19 3.1 Fabrication Process 19 3.2 Fabrication Results 21 3.3 Experiment Setup 24 3.4 MEMS Devices Actuation 25 3.4.1 Cantilever Type MEMS Directional Coupler Actuation 25 3.4.2 Inplane Comb drive Type Phase Shifter Actuation 26 3.5 Device Configurations 27 3.5.1 Ring Resonator 29 3.5.2 Coupled Resonator Optical Waveguides (CROWs) 31 3.5.3 Mach Zehnder Interferometer (MZI) 33 3.6 Packaging 34 Ⅳ. Conclusion 36 References 37 요약문 41
URI
http://dgist.dcollection.net/common/orgView/200000596371
http://hdl.handle.net/20.500.11750/16321
DOI
10.22677/thesis.200000596371
Degree
Master
Department
Robotics Engineering
University
DGIST
Related Researcher
  • Author Yu, Jaesok Advanced Ultrasound Research Laboratory
  • Research Interests Biomedical ultrasound/photoacoustic imaging and therapeutics; Medical image processing; Machine learning-based diagnosis and signal processing; Nano-theranostic platform
Files:
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Collection:
Department of Robotics and Mechatronics EngineeringThesesMaster


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