DGIST Scholar: Scalable Recirculating Programmable Silicon Photonic MEMS

Citation: Do Y. Kim. (2022). Scalable Recirculating Programmable Silicon Photonic MEMS. doi: 10.22677/thesis.200000596371

Subject: Silicon Photonics, Silicon Photonic MEMS, Photonic Integrated Circuits, Programmable Photonics, Programmable Photonic Array

Description: Silicon Photonics, Silicon Photonic MEMS, Photonic Integrated Circuits, Programmable Photonics, Programmable Photonic Array

Table Of Contents: Ⅰ. Introduction 1
1.1 Motivation 1
Ⅱ. Device Architecture 4
2.1 Device Concept 4
2.2 MEMS Devices 6
2.2.1 Cantilever Type MEMS Directional Coupler 7
2.2.2 Vertical Comb Type MEMS Directional Coupler 12
2.2.3 Inplane Comb drive Type Phase Shifter 14
Ⅲ. Results 19
3.1 Fabrication Process 19
3.2 Fabrication Results 21
3.3 Experiment Setup 24
3.4 MEMS Devices Actuation 25
3.4.1 Cantilever Type MEMS Directional Coupler Actuation 25
3.4.2 Inplane Comb drive Type Phase Shifter Actuation 26
3.5 Device Configurations 27
3.5.1 Ring Resonator 29
3.5.2 Coupled Resonator Optical Waveguides (CROWs) 31
3.5.3 Mach Zehnder Interferometer (MZI) 33
3.6 Packaging 34
Ⅳ. Conclusion 36
References 37
요약문 41

URI: http://dgist.dcollection.net/common/orgView/200000596371
http://hdl.handle.net/20.500.11750/16321

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