DGIST Scholar: Transparent Temperature Sensors using Wide-bandgap Semiconductor Diodes and PEDOT:PSS Thermoelectric Generator

Department of Electrical Engineering and Computer Science Theses Master

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Transparent Temperature Sensors using Wide-bandgap Semiconductor Diodes and PEDOT:PSS Thermoelectric Generator

Title: Transparent Temperature Sensors using Wide-bandgap Semiconductor Diodes and PEDOT:PSS Thermoelectric Generator

Alternative Title: 광대역 갭 반도체 다이오드 및 PEDOT:PSS 열전 발전기를 사용하는 온도센서

Author(s): Junhee Lee

DGIST Authors: Junhee Lee ; Hongki Kang ; Hyuk-Jun Kwon

Advisor: 강홍기

Co-Advisor(s): Hyuk-Jun Kwon

Issued Date: 2022

Awarded Date: 2022/02

Type: Thesis

Subject: transparent temperature sensor, heterojunction diode, thermoelectric, PEDOT:PSS

Description: transparent temperature sensor, heterojunction diode, thermoelectric, PEDOT:PSS

Table Of Contents: Ⅰ. Introduction 1
1.1 Motivation 1
Ⅱ. Experimental Methods 6
2.1 Diode structure and materials characterization 6
2.1.1 Fabrication process 6
2.1.2 Post-deposition annealing process 7
2.1.3 Balance bias conditions of the deposited thin films 8
2.1.4 Energy band calculation and offset adjustment 9
2.2 Temperature sensing test 10
2.2.1 Drive mode equations of diode temperature sensor 10
2.2.2 High temporal resolution temperature sensing test 11
2.2.3 Self-heating test 13
2.3 Biocompatibility test 14
2.3.1 Primary culture of cortical neurons 14
2.3.2 live/dead cell assay 15
2.4 Thermoelectric device structure and measurement 16
2.4.1 Fabrication process 16
2.4.2 Experimental setup 17
2.5 Optimization of photothermal effect 18
2.5.1 Gold nanoparticles coating and O2 plasma treatment 18
Ⅲ. Results and Discussion 20
3.1 Optimization of the transparent p-NiO/n-ZnO heterojunction diode 20
3.1.1 Diode device structure 20
3.1.2 I-V characteristics 24
3.2 Temperature sensing test 27
3.2.1 Operating mode and cyclic measurement test 27
3.2.2 High-speed measurement test 30
3.2.3 Self-heating test 31
3.3 Bio imaging test 33
3.3.1 Bio imaging through the diode temperature sensor 33
3.4 Optimization of the PEDOT:PSS thermoelectric temperature sensor 34
3.4.1 Measurement of thermoelectric characteristics 34
3.4.2 Temperature sensing test 37
3.4.3 Characteristics of gold nanoparticles 38
3.4.4 Bio imaging test of PEDOT:PSS thermoelectric temperature sensor 39
Ⅳ. Conclusion 41
4.1 Summary 41
Ⅴ. Appendix 42
5.1 Optimization of the etching conditions of indium tin oxide (ITO) 42
5.2 Optimization of the etching conditions of indium gallium zinc oxide (IGZO) 44
5.3 Measurement of temperature changes in probe station chuck heater 46
5.4 MATLAB source code for notch filter 48