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dc.contributor.advisor 장재은 -
dc.contributor.author Gyeonghyeon Choi -
dc.date.accessioned 2022-03-07T16:00:49Z -
dc.date.available 2022-03-07T16:00:49Z -
dc.date.issued 2022 -
dc.identifier.uri http://dgist.dcollection.net/common/orgView/200000595445 en_US
dc.identifier.uri http://hdl.handle.net/20.500.11750/16346 -
dc.description Vertical TFT, Micro-hole array, IGZO TFT, Schottky diode, PN-heterojunction -
dc.description.statementofresponsibility N -
dc.description.tableofcontents Ⅰ. INTRODUCTION 1
1.1 Background of TFT 1
1.1.1 Structure and operation principle 1
1.1.2 Various channel materials 3
1.2 Vertical TFT 6
1.2.1 Background of vertical TFT 6
Ⅱ. EXPERIMENTAL 16
2.1 Fabrication of metal micro-hole array vertical TFT 16
2.1.1 Metal micro-hole array with oxide passivation layer 20
2.1.2 Metal micro-hole array with PN passivation layer 23
Ⅲ. ELECTRICAL CHARACTERISTICS OF METAL MICRO-HOLE ARRAY VERTICAL TFT 26
3.1 Source metal with Ohmic or Schottky contact 26
3.2 Drain metal with Ohmic or Schottky contact 39
3.3 Characteristic change according to size or thickness 45
Ⅳ. ELECTRICAL CHARACTERISTICS DEPENDING ON VERTICAL TFT STRUCTURE 51
4.1 Metal micro-hole array with oxide passivation layer 51
4.2 Metal micro-hole array with PN passivation layer 56
Ⅴ. CONCLUSION 63
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dc.format.extent 67 -
dc.language eng -
dc.publisher DGIST -
dc.subject Vertical TFT, Micro-hole array, IGZO TFT, Schottky diode, PN-heterojunction -
dc.title Vertical Thin Film Transistor employing micro-hole array structure in a metal electrode -
dc.type Thesis -
dc.identifier.doi 10.22677/thesis.200000595445 -
dc.description.degree Master -
dc.contributor.department Information and Communication Engineering -
dc.contributor.coadvisor Hongki Kang -
dc.date.awarded 2022/02 -
dc.publisher.location Daegu -
dc.description.database dCollection -
dc.citation XT.IM 최14 202202 -
dc.date.accepted 1/21/22 -
dc.contributor.alternativeDepartment 정보통신융합전공 -
dc.embargo.liftdate 20230228 -
dc.contributor.affiliatedAuthor Gyeonghyeon Choi -
dc.contributor.affiliatedAuthor Jae Eun Jang -
dc.contributor.affiliatedAuthor Hongki Kang -
dc.contributor.alternativeName 최경현 -
dc.contributor.alternativeName Jae Eun Jang -
dc.contributor.alternativeName 강홍기 -
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Department of Electrical Engineering and Computer Science Theses Master

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