Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 장재은 | - |
dc.contributor.author | Gyeonghyeon Choi | - |
dc.date.accessioned | 2022-03-07T16:00:49Z | - |
dc.date.available | 2022-03-07T16:00:49Z | - |
dc.date.issued | 2022 | - |
dc.identifier.uri | http://dgist.dcollection.net/common/orgView/200000595445 | en_US |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/16346 | - |
dc.description | Vertical TFT, Micro-hole array, IGZO TFT, Schottky diode, PN-heterojunction | - |
dc.description.statementofresponsibility | N | - |
dc.description.tableofcontents | Ⅰ. INTRODUCTION 1 1.1 Background of TFT 1 1.1.1 Structure and operation principle 1 1.1.2 Various channel materials 3 1.2 Vertical TFT 6 1.2.1 Background of vertical TFT 6 Ⅱ. EXPERIMENTAL 16 2.1 Fabrication of metal micro-hole array vertical TFT 16 2.1.1 Metal micro-hole array with oxide passivation layer 20 2.1.2 Metal micro-hole array with PN passivation layer 23 Ⅲ. ELECTRICAL CHARACTERISTICS OF METAL MICRO-HOLE ARRAY VERTICAL TFT 26 3.1 Source metal with Ohmic or Schottky contact 26 3.2 Drain metal with Ohmic or Schottky contact 39 3.3 Characteristic change according to size or thickness 45 Ⅳ. ELECTRICAL CHARACTERISTICS DEPENDING ON VERTICAL TFT STRUCTURE 51 4.1 Metal micro-hole array with oxide passivation layer 51 4.2 Metal micro-hole array with PN passivation layer 56 Ⅴ. CONCLUSION 63 |
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dc.format.extent | 67 | - |
dc.language | eng | - |
dc.publisher | DGIST | - |
dc.subject | Vertical TFT, Micro-hole array, IGZO TFT, Schottky diode, PN-heterojunction | - |
dc.title | Vertical Thin Film Transistor employing micro-hole array structure in a metal electrode | - |
dc.type | Thesis | - |
dc.identifier.doi | 10.22677/thesis.200000595445 | - |
dc.description.degree | Master | - |
dc.contributor.department | Information and Communication Engineering | - |
dc.contributor.coadvisor | Hongki Kang | - |
dc.date.awarded | 2022/02 | - |
dc.publisher.location | Daegu | - |
dc.description.database | dCollection | - |
dc.citation | XT.IM 최14 202202 | - |
dc.date.accepted | 1/21/22 | - |
dc.contributor.alternativeDepartment | 정보통신융합전공 | - |
dc.embargo.liftdate | 20230228 | - |
dc.contributor.affiliatedAuthor | Gyeonghyeon Choi | - |
dc.contributor.affiliatedAuthor | Jae Eun Jang | - |
dc.contributor.affiliatedAuthor | Hongki Kang | - |
dc.contributor.alternativeName | 최경현 | - |
dc.contributor.alternativeName | Jae Eun Jang | - |
dc.contributor.alternativeName | 강홍기 | - |
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