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MEMS piezoelectric artificial basilar membrane with passive frequency selectivity for short pulse width signal modulation
- MEMS piezoelectric artificial basilar membrane with passive frequency selectivity for short pulse width signal modulation
- Jang, Jongmoon; Kim, Sangwon; Sly, David J.; Oleary, Stephen J.; Choi, Hongsoo
- DGIST Authors
- Jang, Jongmoon; Kim, Sangwon; Choi, Hongsoo
- Issue Date
- Sensors and Actuators, A: Physical, 203, 6-10
- Article Type
- Acoustic Variables Measurement; Acoustic Wave Transmission; Artificial Basilar Membrane (ABM); Basilar Membranes; Electrical Stimulations; Energy Conversion; Fire Alarm Systems; Frequency Selectivity; MEMS; Natural Frequencies; Piezoelectric Acoustic Sensor; Piezoelectric Acoustic Sensors; Piezoelectric Signals; Piezoelectric Voltage; Piezoelectricity; Resonance Frequencies; Sound Pressure Level
- We demonstrated a novel MEMS artificial basilar membrane composed of a piezoelectric beam array that mimics the passive frequency selectivity of the cochlea and exhibits acoustic-to-electrical energy conversion. Each beam was designed to have a unique resonance frequency. To determine the resonance frequencies of the beams, the displacement and piezoelectric voltage were measured by applying a periodic chirped signal with a sound pressure level of 109.7 dB. The measured resonance frequencies were in the range 10-37 kHz. The piezoelectric signal was used to modulate a finite pulse-width signal for electrical stimulation; the pulse widths were in the range 0.43-5.1 ms with sound pressure levels in the range 84.9-112.4 dB. © 2013 Elsevier B.V.
- Related Researcher
Choi, Hong Soo
Bio-Micro Robotics Lab
Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
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- Department of Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles
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