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Scaling characteristics of depletion type, fully transparent amorphous indium-gallium-zinc-oxide thin-film transistors and inverters following Ar plasma treatment

Title
Scaling characteristics of depletion type, fully transparent amorphous indium-gallium-zinc-oxide thin-film transistors and inverters following Ar plasma treatment
Authors
Kim, J[Kim, Joonwoo]Jeong, SM[Jeong, Soon Moon]Jeong, J[Jeong, Jaewook]
DGIST Authors
Kim, J[Kim, Joonwoo]; Jeong, SM[Jeong, Soon Moon]
Issue Date
2015-11
Citation
Japanese Journal of Applied Physics, 54(11)
Type
Article
Article Type
Article
Keywords
Amorphous FilmsAmorphous Indium-Gallium-Zinc-Oxide (A-IGZO)Amorphous Indiumgallium-Zinc Oxide (A-IGZO) Thin-Film Transistor (TFTs)Amorphous SemiconductorsAr Plasma TreatmentDifferential GainElectric InvertersField-Effect MobilitiesGalliumIndiumInterfacial StatePlasma ApplicationsPlasma TheoryPositive ShiftSemiconducting Indium CompoundsShort-ChannelsThin-Film Transistors (TFTs)Thin-FilmsThreshold VoltageZincZinc Oxide
ISSN
0021-4922
Abstract
We fabricated depletion type, transparent amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) and inverters with an Ar plasma treatment and analyzed their scaling characteristics with channel lengths ranging from 2 to 100 μm. The improvement of the field-effect mobility of a-IGZO TFTs is apparent only for short channel lengths. There is also an unexpected side effect of the Ar plasma treatment, which introduces back-channel interfacial states and induces a positive shift in the threshold voltage of a-IGZO TFTs. The resulting increase in the fieldeffect mobility and the positive shift in the threshold voltage of each TFT increase the differential gain up to 3 times and the positive shift in the transient point of the transparent inverters. © 2015 The Japan Society of Applied Physics.
URI
http://hdl.handle.net/20.500.11750/2822
DOI
10.7567/JJAP.54.114102
Publisher
Institute of Physics Publishing
Related Researcher
Files:
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Collection:
Intelligent Devices and Systems Research Group1. Journal Articles
Smart Textile Convergence Research Group1. Journal Articles


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