Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Hu, Huan | - |
dc.contributor.author | Kim, Hoe Joon | - |
dc.contributor.author | Somnath, Suhas | - |
dc.date.available | 2017-08-10T08:16:34Z | - |
dc.date.created | 2017-08-09 | - |
dc.date.issued | 2017-03 | - |
dc.identifier.issn | 2072-666X | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/4224 | - |
dc.description.abstract | Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology. © 2017 by the authors. | - |
dc.language | English | - |
dc.publisher | MDPI AG | - |
dc.title | Tip-Based Nanofabrication for Scalable Manufacturing | - |
dc.type | Article | - |
dc.identifier.doi | 10.3390/mi8030090 | - |
dc.identifier.scopusid | 2-s2.0-85015712441 | - |
dc.identifier.bibliographicCitation | Micromachines, v.8, no.3, pp.90 | - |
dc.description.isOpenAccess | TRUE | - |
dc.subject.keywordAuthor | tip-based nanofabrication | - |
dc.subject.keywordAuthor | scanning probe lithography | - |
dc.subject.keywordAuthor | scalable nanomanufacturing | - |
dc.subject.keywordAuthor | atomic force microscope | - |
dc.subject.keywordAuthor | scanning tunneling microscope | - |
dc.subject.keywordPlus | Atomic Force Microscope | - |
dc.subject.keywordPlus | Atomic Force Microscopy (AFM) | - |
dc.subject.keywordPlus | Chemical Mechanism | - |
dc.subject.keywordPlus | Data Storage | - |
dc.subject.keywordPlus | Dip Pen Nanolithography | - |
dc.subject.keywordPlus | Direct Delivery | - |
dc.subject.keywordPlus | Industrial Research | - |
dc.subject.keywordPlus | Manufacture | - |
dc.subject.keywordPlus | Nano Manufacturing | - |
dc.subject.keywordPlus | Nano Manufacturing Technology | - |
dc.subject.keywordPlus | Nano Meter Scale | - |
dc.subject.keywordPlus | Nanofabrication Techniques | - |
dc.subject.keywordPlus | Nanofountain Probe | - |
dc.subject.keywordPlus | Nanometer Scale Lithography | - |
dc.subject.keywordPlus | Nanotechnology | - |
dc.subject.keywordPlus | Near Field | - |
dc.subject.keywordPlus | Scalable Nanomanufacturing | - |
dc.subject.keywordPlus | Scanning Probe Lithography | - |
dc.subject.keywordPlus | Scanning Tunneling Microscope | - |
dc.subject.keywordPlus | Scanning Tunneling Microscopy | - |
dc.subject.keywordPlus | Silicon Microcantilever Heaters | - |
dc.subject.keywordPlus | State of the Art Techniques | - |
dc.subject.keywordPlus | Technology Development | - |
dc.subject.keywordPlus | Thermal Probe | - |
dc.subject.keywordPlus | Tip Based Nanofabrication | - |
dc.citation.number | 3 | - |
dc.citation.startPage | 90 | - |
dc.citation.title | Micromachines | - |
dc.citation.volume | 8 | - |