Sufficient visual information is vitally needed for microassembly and micromanipulation. However, most of the conventional vision systems with fixed optical parameters cannot meet the requirement for observation of micro parts with complex shapes. Small field of view (FOV), occlusion and low depth resolution are the main important issues to solve. This article presents a view planning method to increase the visibility for observation of micro objects with consideration of resolution and FOV using a variable view imaging system. The system can supply a flexible view with adjustable view angle and position, thereby reducing occlusion. The best view angle is calculated by maximizing the resolution of the surface of interest under acceptable occlusion level. The view position is steered by visual feedback method which can keep the target inside of FOV. Simulations and experimental results show the feasibility of the proposed approach.