Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한상윤 | - |
| dc.contributor.author | Man J. Her | - |
| dc.date.accessioned | 2023-03-22T19:56:49Z | - |
| dc.date.available | 2024-02-28T06:00:28Z | - |
| dc.date.issued | 2023 | - |
| dc.identifier.uri | http://hdl.handle.net/20.500.11750/45718 | - |
| dc.identifier.uri | http://dgist.dcollection.net/common/orgView/200000656269 | - |
| dc.description | silicon photonics, photonic integrated circuits, FPPGA, programmable, MEMS | - |
| dc.description.tableofcontents | Ⅰ. Introduction 1 1.1 Motivation 1 Ⅱ. Device Architecture 4 2.1 MEMS Devices 4 2.1.1 Vertical Comb-Type MEMS Tunable Directional Coupler 4 2.1.2 Vertical Comb-Type MEMS Tunable Phase Shifter 10 2.1.3 In-plane Comb-Type MEMS Tunable Phase Shifter 15 2.2 Device Concept 19 2.2.1 Sagnac Loop Reflector 19 2.2.2 Field Programmable Photonic Gate Array 21 Ⅲ. Results 24 3.1 Fabrication 24 3.1.1 Fabrication Process 24 3.1.2 Fabrication Results 26 3.2 MEMS Devices 28 3.2.1 Vertical Comb-Type MEMS Tunable Directional Coupler 28 3.2.2 In-plane Comb-Type MEMS Tunable Phase Shifter 30 3.3 Device Configurations 31 3.3.1 Sagnac Loop Reflector 31 3.3.2 Field Programmable Photonic Gate Array 34 Ⅳ. Conclusion 39 References 40 |
- |
| dc.format.extent | 44 | - |
| dc.language | eng | - |
| dc.publisher | DGIST | - |
| dc.title | Programmable Photonic Integrated Circuits Using Low Power Consumption MEMS | - |
| dc.type | Thesis | - |
| dc.identifier.doi | 10.22677/THESIS.200000656269 | - |
| dc.description.degree | Master | - |
| dc.contributor.department | Department of Robotics and Mechatronics Engineering | - |
| dc.contributor.coadvisor | Jaesok Yu | - |
| dc.date.awarded | 2023-02-01 | - |
| dc.publisher.location | Daegu | - |
| dc.description.database | dCollection | - |
| dc.citation | XT.RM 허32 202302 | - |
| dc.date.accepted | 2023-03-21 | - |
| dc.contributor.alternativeDepartment | 로봇및기계전자공학과 | - |
| dc.subject.keyword | silicon photonics | - |
| dc.subject.keyword | photonic integrated circuits | - |
| dc.subject.keyword | FPPGA | - |
| dc.subject.keyword | programmable | - |
| dc.subject.keyword | MEMS | - |
| dc.contributor.affiliatedAuthor | Man J. Her | - |
| dc.contributor.affiliatedAuthor | Sangyoon Han | - |
| dc.contributor.affiliatedAuthor | Jaesok Yu | - |
| dc.contributor.alternativeName | 허만재 | - |
| dc.contributor.alternativeName | Sangyoon Han | - |
| dc.contributor.alternativeName | 유재석 | - |
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