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Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications

Title
Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications
Author(s)
Jung, Soon InJang, Il RyuRyu, ChaehyunPark, JeonhyeongPadhan, Aneeta ManjariKim, Hoe Joon
Issued Date
2023-04
Citation
Scientific Reports, v.13, no.1
Type
Article
Keywords
RELATIVE-HUMIDITYHIGH-FREQUENCYNOISEFABRICATIONRESONATORSSTABILITYDEVICESGAS
ISSN
2045-2322
Abstract
This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material. The proposed sensor consists of SWARs at three different resonant frequencies (180, 200 and 250MHz) with a shared common sensing region, thus allowing direct analysis of sensor performances at different operating frequencies. Our findings reveal that the resonant frequency of the sensor impacts both measurement sensitivity and stability. A higher operating frequency ensures better sensitivity but suffers from a larger damping effect from absorbed water molecules. The maximum measurement sensitivity of 17.4ppm/RH% is achieved with low drift. In addition, the developed sensor exhibits improved stability and sensitivity by as much as 150% and 75% in frequency shift and Quality factor (Q), respectively, by carefully selecting the operating frequencies at a given RH% range. Finally, the sensors are used for various hygienic applications, such as non-contact proximity detection and face mask inspection. © 2023, The Author(s).
URI
http://hdl.handle.net/20.500.11750/46517
DOI
10.1038/s41598-023-34099-7
Publisher
Nature Publishing Group
Related Researcher
  • 김회준 Kim, Hoe Joon
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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Department of Robotics and Mechatronics Engineering Nano Materials and Devices Lab 1. Journal Articles

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