Department of Robotics and Mechatronics Engineering
Advanced Ultrasound Research Laboratory
2. Conference Papers
Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane
- Title
- Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane
- Author(s)
- Choi, Dong Ju ; Nam, Sangwoo ; Kim, Dong Uk ; Park, Young Jae ; Her, Man Jae ; Lim, Min Gi ; Hong, Myeong Seok ; Song, Hyeju ; Yu, Jaesok ; Han, Sangyoon
- Issued Date
- 2022-08-04
- Citation
- Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2022), pp.1 - 2
- Type
- Conference Paper
- ISSN
- 2162-2701
- Abstract
- We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively. © 2022 The Author(s) © IEEE 2022.
- Publisher
- Optica Publishing Group (formerly OSA)
- Related Researcher
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Yu, Jaesok
- Research Interests Biomedical ultrasound/photoacoustic imaging and therapeutics; Medical image processing; Machine learning-based diagnosis and signal processing; Nano-theranostic platform
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