Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Abstract

We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively. © 2022 The Author(s) © IEEE 2022.