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  Department of Robotics and Mechatronics Engineering Advanced Ultrasound Research Laboratory 2. Conference Papers
Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane
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Title
Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane
Issued Date
2022-08-04
Citation
Choi, Dong Ju. (2022-08-04). Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane. Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2022), 1–2. doi: 10.1364/CLEOPR.2022.CThA17D_02
Type
Conference Paper
ISSN
2162-2701
Abstract
We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively. © 2022 The Author(s) © IEEE 2022.
URI
http://hdl.handle.net/20.500.11750/46819
DOI
10.1364/CLEOPR.2022.CThA17D_02
Publisher
Optica Publishing Group (formerly OSA)
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Yu, Jaesok유재석

Department of Robotics and Mechatronics Engineering

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