Department of Robotics and Mechatronics Engineering
Advanced Ultrasound Research Laboratory
2. Conference Papers
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi, Dong Ju | - |
| dc.contributor.author | Nam, Sangwoo | - |
| dc.contributor.author | Kim, Dong Uk | - |
| dc.contributor.author | Park, Young Jae | - |
| dc.contributor.author | Her, Man Jae | - |
| dc.contributor.author | Lim, Min Gi | - |
| dc.contributor.author | Hong, Myeong Seok | - |
| dc.contributor.author | Song, Hyeju | - |
| dc.contributor.author | Yu, Jaesok | - |
| dc.contributor.author | Han, Sangyoon | - |
| dc.date.accessioned | 2023-12-26T18:12:57Z | - |
| dc.date.available | 2023-12-26T18:12:57Z | - |
| dc.date.created | 2023-08-17 | - |
| dc.date.issued | 2022-08-04 | - |
| dc.identifier.issn | 2162-2701 | - |
| dc.identifier.uri | http://hdl.handle.net/20.500.11750/46819 | - |
| dc.description.abstract | We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively. © 2022 The Author(s) © IEEE 2022. | - |
| dc.language | English | - |
| dc.publisher | Optica Publishing Group (formerly OSA) | - |
| dc.title | Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane | - |
| dc.type | Conference Paper | - |
| dc.identifier.doi | 10.1364/CLEOPR.2022.CThA17D_02 | - |
| dc.identifier.scopusid | 2-s2.0-85166467709 | - |
| dc.identifier.bibliographicCitation | Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2022), pp.1 - 2 | - |
| dc.identifier.url | https://confit.atlas.jp/guide/event/cleopr2022/subject/CThA17D-02/advanced | - |
| dc.citation.conferencePlace | JA | - |
| dc.citation.conferencePlace | Sapporo | - |
| dc.citation.endPage | 2 | - |
| dc.citation.startPage | 1 | - |
| dc.citation.title | Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2022) | - |
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