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Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane
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- Title
- Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane
- Issued Date
- 2022-08-04
- Citation
- Choi, Dong Ju. (2022-08-04). Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane. Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2022), 1–2. doi: 10.1364/CLEOPR.2022.CThA17D_02
- Type
- Conference Paper
- ISSN
- 2162-2701
- Abstract
-
We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively. © 2022 The Author(s) © IEEE 2022.
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- Publisher
- Optica Publishing Group (formerly OSA)
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