Department of Robotics and Mechatronics Engineering Intelligent Nanophotonics Lab 3. Patents
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원자층 증착법에 기반하는 광학 소자의 제조방법

Title
원자층 증착법에 기반하는 광학 소자의 제조방법
Alternative Title
METHOD FOR MANUFACTURING OPTICAL ELEMENT BASE ON ATOMIC LAYER DEPOSITION
Author(s)
박영재 ; 한상윤
Country
KO
Application Date
2022-02-23
Application No.
10-2022-0023575
Registration Date
2024-01-16
Publication No.
10-2626971
Assignee
재단법인대구경북과학기술원
URI
http://hdl.handle.net/20.500.11750/47669 10-2022-0023575
Abstract
본 발명은 원자층 증착법에 기반하는 광학 소자의 제조방법에 관한 것으로, 일실시예에 따른 광학 소자의 제조방법은 기설정된 갭(gap)을 두고 서로 이격된 복수의 도파관(waveguide)이 형성된 기판을 챔버로 로딩하는 단계 및 원자층 증착법을 통해 복수의 도파관 각각에 금속 산화물을 증착하는 단계를 포함한다.
Related Researcher
  • 한상윤 Han, Sangyoon
  • Research Interests Nanophotonic devices; photonic integrated circuits; optical neural networks; optical MEMS
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