Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Lee, Bom | - |
dc.contributor.author | Ko, Young Chun | - |
dc.contributor.author | Kim, Simon | - |
dc.contributor.author | Lee, Su Eon | - |
dc.contributor.author | Jin, Ho Jun | - |
dc.contributor.author | Chang, Dong Joon | - |
dc.contributor.author | Park, Min-Ho | - |
dc.contributor.author | Kim, Bong Hoon | - |
dc.date.accessioned | 2024-02-02T03:10:14Z | - |
dc.date.available | 2024-02-02T03:10:14Z | - |
dc.date.created | 2023-10-25 | - |
dc.date.issued | 2023-11 | - |
dc.identifier.issn | 2058-9689 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/47725 | - |
dc.description.abstract | The development of dry adhesive pads (DAPs) is essential to prevent wafer detachment from high-speed wafer-transfer robot arms. However, polydimethylsiloxane (PDMS)-based DAPs, which are insulating elastomers, generate residual charges inside DAPs. These cause charge accumulation and electrostatic interactions between the DAP and the wafer interface. Furthermore, at a high processing temperature of >300 °C, the adhesive and mechanical strengths of conventional DAPs are degraded because of their low thermal and mechanical stability. In this study, we developed bio-inspired DAPs (BDAPs) with various shapes (hole, cylinder, and line patterns) and different contact areas (20, 40, and 60%) through systematic investigations to determine optimized patterns and shapes for different motions. Additionally, we fabricated a multi-walled carbon nanotube (MWCNT)/PDMS composite-based BDAP (c-BDAP), which exhibited high heat resistance and high electrical conductivity. The conductivity of c-BDAP was 6.16 × 10−3 S m−1, and it had a weight loss of ∼4% at 300 °C after 1 h. Our findings can inspire the development of low-cost and high-performance c-BDAPs, which are reliable for various robot arm movements. © 2023 The Royal Society of Chemistry. | - |
dc.language | English | - |
dc.publisher | Royal Society of Chemistry | - |
dc.title | Bio-inspired dry adhesive pads using multi-walled carbon nanotube/polydimethylsiloxane composites for efficient wafer transfer robot arms in smart factories | - |
dc.type | Article | - |
dc.identifier.doi | 10.1039/d3me00126a | - |
dc.identifier.wosid | 001069605600001 | - |
dc.identifier.scopusid | 2-s2.0-85172800124 | - |
dc.identifier.bibliographicCitation | Molecular Systems Design & Engineering, v.8, no.12, pp.1520 - 1525 | - |
dc.description.isOpenAccess | FALSE | - |
dc.subject.keywordPlus | NANOTUBES | - |
dc.subject.keywordPlus | CHUCK | - |
dc.citation.endPage | 1525 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 1520 | - |
dc.citation.title | Molecular Systems Design & Engineering | - |
dc.citation.volume | 8 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry; Engineering; Science & Technology - Other Topics; Materials Science | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical; Engineering, Chemical; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary | - |
dc.type.docType | Article | - |
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