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Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods

Title
Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods
Authors
Kong, Bo HyunChoi, Mi KyungCho, Hyung KounKim, Jae HyunBaek, SunghoLee, Jung-Ho
DGIST Authors
Kim, Jae HyunBaek, Sungho
Issue Date
2010
Citation
Electrochemical and Solid State Letters, 13(2), K12-K14
Type
Article
Article Type
Article
Keywords
Al-Doped ZnOAluminumAspect RatioAZO FilmsCoatingsConductive FilmsConformal CoatingsDepositionElectric ConductivityElectrical ConductivityElectrical PerformanceElectrodesHigh Aspect RatioLow Dimensional StructureMicrorodsOptical FilmsOptical TransmittanceOptoelectronic DevicesPhotoresistsPolycrystalline StructurePressure DropSi SubstratesSiliconTransparent Conductive OxidesTransparent ElectrodeZinc OxideZnO:Al Films
ISSN
1099-0062
Abstract
Al-doped ZnO (AZO) thin films were grown by atomic layer deposition (ALD) for use as transparent conductive oxides on high aspect ratio Si microrod arrays. The ALD-deposited AZO films showed high optical transmittance and electrical conductivity despite their polycrystalline structures and resulted in a superior conformal coating on the surface and side regions of the Si microrods. The films also exhibited an electrical performance identical to that of the AZO film on a flat Si substrate. These results revealed that ALD-deposited AZO films are promising candidates for electrodes in the next-generation optoelectronic devices based on low dimensional structures, which require conformal coating. © 2009 The Electrochemical Society.
URI
http://hdl.handle.net/20.500.11750/5414
DOI
10.1149/1.3267051
Publisher
Electrochemical and Solid-State
Related Researcher
Files:
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Collection:
Smart Textile Convergence Research Group1. Journal Articles


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