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압저항 타입의 압력 측정 센서 및 그것의 제조 방법

Title
압저항 타입의 압력 측정 센서 및 그것의 제조 방법
Alternative Title
PIEZORESISTIVE TYPE PRESSURE MEASURING SENSOR AND MANUFACTURING METHOD FOR THE SAME
Author(s)
김회준김항겸
Country
KO
Application Date
2022-04-04
Application No.
10-2022-0041566
Registration Date
2024-05-02
Publication No.
10-2664023
Assignee
(재)대구경북과학기술원(100/100)
URI
http://hdl.handle.net/20.500.11750/56605 10-2022-0041566
Related Researcher
  • 김회준 Kim, Hoe Joon
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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Department of Robotics and Mechatronics Engineering Nano Materials and Devices Lab 3. Patents

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