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Surface acoustic wave (SAW) sensors are widely recognized for their high sensitivity and reliability, which make them suitable for diverse applications. However, they continue to face limitations in repeatability, detection limits, and effective use in extreme environments as well as in biosensing and industrial settings. A critical factor in enhancing the performance of SAW sensors lies not only in the selection of advanced sensing materials but also in the precise methods of material integration. Recent advancements have com-bined nanostructured materials, which improve the surface characteristics, with analyte-specific substances that strengthen interactions, resulting in heightened sensitivity and accuracy. This review categorizes recent SAW sensor studies based on their applications and materials and provides an extensive overview for researchers. Additionally, it highlights how integration techniques affect the uniformity, thickness, and stability of the sensing films, all of which are essential for high-performance sensors. This study aimed to serve as a valu-able resource for the development of SAW sensors with high reliability and longevity under challenging conditions. © 2024, Korean Sensors Society. All rights reserved.
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