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마그네트론 스퍼터링 장치
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- Title
- 마그네트론 스퍼터링 장치
- Alternative Title
- MAGNETRON SPUTTER DEVICE
- Country
- US
- Application Date
- 2023-10-18
- Application No.
- 18/287,318
- Registration Date
- 2025-04-01
- Publication No.
- 12,266,516
- Assignee
- (재)대구경북과학기술원(100/100)
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