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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김준우 | - |
| dc.contributor.author | 김준서 | - |
| dc.date.accessioned | 2025-05-01T02:10:30Z | - |
| dc.date.available | 2025-05-01T02:10:30Z | - |
| dc.identifier.uri | http://hdl.handle.net/20.500.11750/58341 | - |
| dc.title | 마그네트론 스퍼터링 장치 | - |
| dc.title.alternative | MAGNETRON SPUTTER DEVICE | - |
| dc.type | Patent | - |
| dc.identifier.bibliographicCitation | 김준우. 마그네트론 스퍼터링 장치. | - |
| dc.publisher.country | US | - |
| dc.identifier.patentApplicationNumber | 18/287,318 | - |
| dc.date.application | 2023-10-18 | - |
| dc.identifier.patentRegistrationNumber | 12,266,516 | - |
| dc.date.registration | 2025-04-01 | - |
| dc.contributor.assignee | (재)대구경북과학기술원(100/100) | - |
| dc.type.iprs | 특허 | - |
